@misc{Youssef_Abdallah_A._Diffusion, author={Youssef, Abdallah A. and Sowa, Marek (1944- ). and Sielanko, Juliusz (1938- ). and Żuk, Włodzimierz (1916-1981).}, howpublished={online}, publisher={UMCS}, language={eng}, type={artykuł}, title={Diffusion phosphorus and arsenic ions implanted into mono- and polycristalline-Si}, keywords={fizyka}, }