@misc{Sowa_Marek_(1944-_)._Pressure, author={Sowa, Marek (1944- ). and Meldizon, Jerzy (1927- ). and Żuk, Włodzimierz (1916-1981). and Mazurek, Adam (chemik).}, howpublished={online}, publisher={UMCS}, language={eng}, type={artykuł}, title={Pressure influence of some residual gases on the sputtering rate of Si}, keywords={fizyka}, }